Record number :
996991
Title of article :
In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition
Author/Authors :
C.-L Cheng، نويسنده , , C.-T Chia، نويسنده , , C.-C Chiu، نويسنده , , C.-C Wu، نويسنده , , H.-F Cheng، نويسنده , , I.-N Lin، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
6
From page :
251
To page :
256
Abstract :
Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm−1) and G-band (∼1582 cm−1) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp3-bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.
Keywords :
Hydrogen etching , Raman spectroscopy , Diamond-like carbon , PLD
Journal title :
Applied Surface Science
Serial Year :
2001
Link To Document :
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