Record number :
Title of article :
Study of a dual-frequency laser interferometer with unique optical subdivision techniques
Author/Authors :
Cheng، Zhaogu نويسنده , , Gao، Haijun نويسنده , , Zhang، Zhiping نويسنده , , Huang، Huijie نويسنده , , Zhu، Jianqiang نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2006
Pages :
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Abstract :
A dual-frequency laser interferometer has been developed based on a low-performance commercial interferometer. An optical resolution of 1.24 nm and a nanometer-scale accuracy have been achieved by using unique techniques to obtain an optical subdivision factor of 1/8. A method for reducing static positioning errors was also shown. The measurement of a free-falling body was performed to test the maximum achievable target velocity of the device. The experimental setup for measuring the static positioning errors was also given. The new interferometer could be widely used in nanometer-scale fabrications and measurements.
Keywords :
inhibition of S(IV) autoxidation , atmospheric VOC , isoprene oxidation , isoprene , Sulphur dioxide
Journal title :
Applied Optics
Journal title :
Applied Optics
Serial Year :
Link To Document :