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Title of article :
Effect of Catalyst on the Growth of Diamond-like Carbon by HFCVD
Author/Authors :
Aghaie, M Faculty of Chemistry - North Tehran Branch - Islamic Azad University, Tehran , Ghoranneviss, M Islamic Azad University,Tehran , Purrajabi, Z Department of Chemistry - Science and Research Branch - Islamic Azad University, Tehran
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Abstract :
Diamond like carbon (DLC) film was grown by hot filament chemical vapor deposition (HFCVD) technique. In the present work, we investigated the quality of the DLC films groew on the substrates that were coated with various metal nanocatalysts (Au and Ni). A combination of CH4/Ar/H2 renders the growth of carbon nanostructures technique (diamond like carbon). The utilized samples were characterized by the scanning electron microscopy (SEM) and Raman spectroscopy techniques.
Keywords :
Diamond like carbon , DLC , HFCVD , Raman sepectroscopy
Journal title :
Astroparticle Physics
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