Record number :
2192235
Title of article :
Ultra-deep LIGA process and its applications
Author/Authors :
Cheng، نويسنده , , Y. and Shew، نويسنده , , B.-Y. and Chyu، نويسنده , , M.K. and Chen، نويسنده , , P.H.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
6
From page :
1192
To page :
1197
Abstract :
Deep X-ray lithography developed in Germany around the 1980s is an important micromachining technology. Combined with electroplating and molding, this technology can produce micromachining parts with low cost and flexible choices of material. The ultra-deep (UD) LIGA process developed at the Synchrotron Radiation Research Center (SRRC) that provides better development of photoresist is capable of producing microstructures of millimeters in size. The ongoing micromachining projects at SRRC benefited from this UD LIGA process include: microfiber spinneret, leadframe punch, and w-band klystrino.
Keywords :
Ultra-deep X-ray lithography , Synchrotron radiation , Micromachining , Thick-film lithography , Ultra-deep LIGA process
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Journal title :
Nuclear Instruments and Methods in Physics Research Section A
Serial Year :
2001
Link To Document :
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