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Title of article :
Fabrication of hierarchical micro/nanostructures via scanning probe lithography and wet chemical etching
Author/Authors :
Choi، نويسنده , , Inhee and Kim، نويسنده , , Younghun and Yi، نويسنده , , Jongheop، نويسنده ,
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Abstract :
In this study, we propose a simple and effective method for fabricating hierarchical silicon structures via the combination of scanning probe lithography (SPL) and wet chemical etching. Here, silicon oxide structures were protruded from a 〈1 0 0〉-oriented silicon surface, followed by the passivation of silicon nitride by AFM tip-induced local oxidation. Based on the two-dimensional (2D) silicon oxide patterns, three-dimensional (3D) microstructures with high aspect ratios were formed by wet etching with HF and KOH. A variety of combinations of SPL and the etching process allowed us to fabricate diverse silicon-based structures such as deep-etched microstructures and multi-terraced nanostructures.
Keywords :
Silicon structure , Atomic force microscopy (AFM) , Wet etching , Scanning probe lithography (SPL)
Journal title :
Astroparticle Physics
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