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Title of article :
Ultra-deep LIGA process and its applications
Author/Authors :
Cheng، نويسنده , , Y. and Shew، نويسنده , , B.-Y. and Chyu، نويسنده , , M.K. and Chen، نويسنده , , P.H.، نويسنده ,
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Abstract :
Deep X-ray lithography developed in Germany around the 1980s is an important micromachining technology. Combined with electroplating and molding, this technology can produce micromachining parts with low cost and flexible choices of material. The ultra-deep (UD) LIGA process developed at the Synchrotron Radiation Research Center (SRRC) that provides better development of photoresist is capable of producing microstructures of millimeters in size. The ongoing micromachining projects at SRRC benefited from this UD LIGA process include: microfiber spinneret, leadframe punch, and w-band klystrino.
Keywords :
Thick-film lithography , Ultra-deep X-ray lithography , Ultra-deep LIGA process , Micromachining , Synchrotron radiation
Journal title :
Astroparticle Physics
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