Record number :
1804592
Title of article :
Effect of laser fluences on the structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation
Author/Authors :
Cheng، نويسنده , , Y.H and Qiao، نويسنده , , X.L. and Chen، نويسنده , , J.G. and Wu، نويسنده , , Y.P and Xie، نويسنده , , C.S. and Wang، نويسنده , , Y.Q. and Xu، نويسنده , , D.S and Mo، نويسنده , , S.B and Sun، نويسنده , , Y.B، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Pages :
8
From page :
269
To page :
276
Abstract :
Carbon nitride films were deposited by direct current plasma assisted pulsed laser ablation of a graphite target under a nitrogen atmosphere at room temperature. The surface morphology, composition and bonding structure of the deposited films were characterized by atomic force microscopy (AFM), Fourier transform infrared (FTIR) spectroscopy, Raman, and X-ray photoelectron spectroscopy (XPS). The effect of laser fluences in the range 0.5–3 J/cm2 on the surface morphology, composition and bonding structure of the carbon nitride films were systematically studied. As laser fluence is increased, AFM results show a great decrease in the surface roughness of carbon nitride films. FTIR and XPS results indicate an increase in the N/C ratio and the content of N atoms bonded to sp3 C, as well as a decrease in the content of H atoms and the content of N atoms boned to sp2 C in the deposited films, and Raman spectra indicate an increase in the content of disordered sp2 C atoms and the sp2 cluster size. The increase in the film density and the decrease in the particle fraction contribute to the decrease of surface roughness with increasing laser fluence.
Keywords :
Carbon nitride films , Laser ablation deposition , Laser fluence , XPS , FTIR SPECTROSCOPY
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
Serial Year :
2002
Link To Document :
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