Record number :
1176090
Title of article :
Effect of the deposition parameters on the properties of the two-layer surface coatings obtained using magnetron sputtering
Author/Authors :
L.A. Dobrzanski، نويسنده , , W Kwa?ny، نويسنده , , R Shishkov، نويسنده , , J Madejski، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
9
From page :
493
To page :
501
Abstract :
This paper presents the effect of the deposition parameters on the properties of the Ti+TiN, Ti+Ti(CxNx−1), and Ti+TiC two-layer surface coatings obtained using magnetron sputtering in a vacuum furnace with a controlled temperature on a sintered ASP 30 high-speed matrix. Results of the investigated coatings’ tests are presented, depending on the working atmosphere, distance from the magnetron shield, and vacuum furnace temperature. Their effect on the structural and mechanical properties of the coatings has been evaluated.
Keywords :
PVD coatings , Adhesion , Texture coefficient , Diffusion
Journal title :
Journal of Materials Processing Technology
Link To Document :