Record number :
Title of article :
Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses
Author/Authors :
S. Petrovi?، نويسنده , , B. Gakovic، نويسنده , , D. Peru?ko، نويسنده , , M. Trtica، نويسنده , , Bojan B. Radak، نويسنده , , B. u tar i and P. Panjan، نويسنده , , Scepan S. Miljanic، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2008
Pages :
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Abstract :
Interaction of a nanosecond transversely excited atmospheric (TEA) CO2 laser, operating at 10.6 μm, with tungsten–titanium thin film (190 nm) deposited on silicon of n-type (1 0 0) orientation, was studied. Multi-pulse irradiation was performed in air atmosphere with laser energy densities in the range 24–49 J/cm2. The energy absorbed from the laser beam was mainly converted to thermal energy, which generated a series of effects. The following morphological changes were observed: (i) partial ablation/exfoliation of the WTi thin film, (ii) partial modification of the silicon substrate with formation of polygonal grains, (iii) appearance of hydrodynamic features including nano-globules. Torch-like plumes started appearing in front of the target after several laser pulses.
Keywords :
WTi thin films , Laser ablation , Nanosecond laser pulse
Journal title :
Applied Surface Science
Link To Document :