Record number :
1003455
Title of article :
Ripple surface generated on hydrogenated amorphous carbon nitride films
Author/Authors :
Chengbing Wang، نويسنده , , Shengrong Yang، نويسنده , , Junyan Zhang، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Pages :
4
From page :
4099
To page :
4102
Abstract :
It is reported for the first time that the periodical ripple surface feature at micrometer-scale was observed on hydrogenated amorphous carbon nitride films deposited by pulse plasma chemical vapor deposition (CVD) technique. Nitrogen incorporation to hydrogenated amorphous carbon films and the different growing environments of pulse dc plasma discharge perhaps played crucial role in the surface morphology transformation of hydrogenated amorphous carbon nitride films
Keywords :
Ripple morphology , Carbon nitride films
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
2007
Link To Document :
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