Record number :
Title of article :
Morphological and structural characterization of CrO2/Cr2O3 films grown by Laser-CVD
Author/Authors :
P.M. Sousa، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
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Abstract :
This work reports on the synthesis of chromium (III, IV) oxides films by KrF laser-assisted CVD. Films were deposited onto sapphire substrates at room temperature by the photodissociation of Cr(CO)6 in dynamic atmospheres containing oxygen and argon. A study of the processing parameters has shown that partial pressure ratio of O2 to Cr(CO)6 and laser fluence are the prominent parameters that have to be accurately controlled in order to co-deposit both the crystalline oxide phases. Films consistent with such a two-phase system were synthesised for a laser fluence of 75 mJ cm 2 and a partial pressure ratio of about 1.
Keywords :
CrO2/Cr2O3 two-phase system , photodissociation , Laser-assisted CVD
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
Link To Document :