The ablation rates of two polyimides (PMDA and DurimidTM) and one triazene polymer were studied by gravimetric (quartz
microbalance) and profilometric (profilometer) methods at irradiation wavelengths of 193, 248 and 308 nm. The ablation rates
determined by the two methods are discussed in the context of the absorption behavior of the materials. Furthermore, the
consistence of the two experimental methods is discussed for the ablation rates of DurimidTM and the triazene polymer. The
gravimetric measurements revealed a good correlation between the ablation rate and the absorption properties of the examined
materials. The comparison of the gravimetric and the profilometric measurements suggest a significant mass removal, e.g. by
formation of gaseous products, prior to the detection of changes in the surface morphology.