Record number :
1000770
Title of article :
Electron beam induced surface modification of amorphous Sb2S3 chalcogenide films
Author/Authors :
R.K Debnath، نويسنده , , A.G. Fitzgerald، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
3
From page :
148
To page :
150
Abstract :
A surface modification (expansion) has been observed in amorphous antimony based chalcogenide (Sb2S3) thin films when a pulsed electron beam is focused onto the surface of the film at accelerating voltages between 15 and 30 kV. The dependence of pattern heights and width on parameters such as exposure time, beam current and accelerating voltage have also been studied. The modification of the film surface involves lateral and vertical expanded which is typically in the micrometre and submicrometre range. This phenomenon can be explained in terms of electrostatic force.
Keywords :
Amorphous materials , Antimony , Atomic force microscopy
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
2005
Link To Document :
بازگشت