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Title of article :
Influence of different post-treatments on the structure and optical properties of zinc oxide thin films
Author/Authors :
Ruijin Hong*، نويسنده , , Jianbing Huang، نويسنده , , Hongbo He، نويسنده , , Zhengxiu Fan، نويسنده , , Jianda Shao، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
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Abstract :
Zinc oxide (ZnO) films with c-oriented were grown on fused quartz glass substrates at room temperature using dc reactive magnetron sputtering. The as-grown films were annealed at 700 8C in air and bombarded by ion beam, respectively. The effects of post-treatments on the structural and optical properties of the ZnO films were investigated by X-ray diffraction (XRD), photoluminescence (PL), optical transmittance and absorption measurements. The XRD spectra indicate that the crystal quality of ZnO films has been improved by both the post-treatments. Compared with the as-grown sample, both annealed and bombarded samples exhibited blueshift in the UVemission peaks, and a strong green emission was found in the annealed ZnO film. In both optical transmittance and absorption spectra, a blueshift of the band-gap edge was observed in the bombarded film, while a redshift was observed in the annealed film
Keywords :
thin films , annealing , Zinc oxide , Ion beam bombardment
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
Link To Document :