Record number :
1000702
Title of article :
Auger electron spectroscopy analysis of high metal content micro-structures grown by electron beam induced deposition
Author/Authors :
F. Cicoira، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
7
From page :
107
To page :
113
Abstract :
An auger electron spectroscopy study was carried out on Rh-containing micro-structures grown by electron beam induced deposition (EBID) of the iso-structural and iso-electronic precursors [RhCl(PF3)2]2 and [RhCl(CO)2]2. A material containing between 55 and 60 at.% Rh was obtained from both precursors. The chemical composition of structures grown from the two different precursors indicates a similar decomposition mechanism. Deposits grown from [RhCl(PF3)2]2 showed a chemical composition independent of electron energy and electron dose in the investigated range of conditions
Keywords :
chemical vapor deposition , Nanomaterials , Auger electron spectroscopy
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
2005
Link To Document :
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