Record number :
1000680
Title of article :
Formation of array microstructures on silicon by multibeam interfered femtosecond laser pulses
Author/Authors :
Quan-Zhong Zhao*، نويسنده , , Jianrong Qiu، نويسنده , , Chongjun Zhao، نويسنده , , Xiong-Wei Jiang، نويسنده , , Cong-Shan Zhu، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
4
From page :
416
To page :
419
Abstract :
We report on an optical interference method to fabricate array microstructures on the surface of silicon wafers by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed microstructures with micrometer-order were fabricated. The diffraction characteristics of the fabricated structures were evaluated. The present technique allows one-step realization of functional optoelectronic devices on silicon surface
Keywords :
interference , Diffractive beam splitter , Silicon , Femtosecond laser , Array microstructure
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
2005
Link To Document :
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