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Title of article :
Electron energy-loss spectroscopic study of the surface of ceria abrasives
Author/Authors :
Shelley R. Gilliss، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
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Abstract :
Surfaces of ceria (CeO2) particles have been studied by electron energy-loss spectroscopy in a field-emission gun scanning transmission electron microscope. All the ceria particles analyzed contained Ce3+ at the surface. Rare-earth impurities such as La were enriched at the surface and were observed for particles ranging from tens to hundreds of nanometers in size. Fluorine in the abrasives corresponded to a lower average cerium valence. Time series investigations indicate that fluorine substitutes on the oxygen sub-lattice and is charge-balanced by some cerium changing from Ce4+ to Ce3+.
Keywords :
CMP , Ceria , EELS , Segregation , non-stoichiometry
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
Link To Document :