Record number :
Title of article :
Optical characterization of surfaces by robust reflectance determination based on air-gap interference
Author/Authors :
J.C. Martinez-Anto´n*، نويسنده , , J.A. Quiroga، نويسنده , , R. Gonza´lez-Moreno، نويسنده , , E. Bernabeu، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
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Abstract :
In this work we present an optical tool for characterizing the reflectance and polarimetric properties of surfaces. It uses only the image of the interference fringe pattern produced in a thin air-gap between the surface of interest and a glass surface acting as a reference. From only the contrast of the fringe pattern captured with a CCD we may obtain the reflectance of the surface, no need of measuring a reference beam. By taking two images with polarized light, we may get then the polarized reflectance Rp and Rs, but also the ellipsometric magnitude D, simply as a phase shift between fringes in p and s polarization. A sample of silicon with a thin layer of thermally grown silica is used to test the method.
Keywords :
Newton rings , Optical characterization , Spectrophotometry , Photo-interferometric envelope analysis
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
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Link To Document :