Record number :
Title of article :
Development of new X-ray microscopy using a low-energy electron beam
Author/Authors :
Kazuyuki Ueda، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
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Abstract :
Recently, a low-energy electron (ca. 1 keV) excited X-ray microscopy has been developed using the time-of-flight technique in an ultra-high vacuum. Since this X-ray microscope is an application of an electron-stimulated desorption (ESD) microscope, surface hydrogen detection and the Auger electron spectroscopy are also available at the same probing point on the surface. In this report, X-ray microscope and ESD microscope images are demonstrated for a micro-channel plate and Cu-mesh in the electron energy ranging from 900 eV to 1.4 keV with a spatial resolution of ca. 50 nm to 100 nm.
Keywords :
X-ray microscopy , Time-of-flight technique , Scanning electron beam , Electron excitation
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
Link To Document :