Record number :
Title of article :
Characterization of TiN thin films subjected to nanoindentation using focused ion beam milling
Author/Authors :
L.W. Marcoux، نويسنده , , J.M. Cairney، نويسنده , , M.J. Hoffman، نويسنده , , P.R. Munroe، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
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Abstract :
The microstructure and surface morphology of a TiN hard, wear resistant coating on a V820 nitridable alloy ductile steel substrate following nanoindentation have been characterized using focused ion beam (FIB) milling. ATiN coating, 0.6 mm in thickness, was deposited on a ductile steel substrate using a cathodic arc evaporation (CAE) technique. Pop-in events were observed in the load–displacement curves and correlated to the observed microstructural features. Following nanoindentation with a 1 mm radius spherical indenter at loads of 100 mN and 500 mN, circumferential cracks were observed inside the indentation. Observations of nanoindented cross-sections prepared using FIB revealed both columnar cracks in the coating and shear steps at the coating–substrate interface. These structural features were observed at higher resolution using a transmission electron microscope (TEM).
Keywords :
Nanoindentation , TIN , thin films , FIB
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
Link To Document :