Record number :
1000387
Title of article :
Hydrogen and oxygen behaviors on Porous-Si surfaces observed using a scanning ESD ion microscope
Author/Authors :
Yuki Itoh، نويسنده , , Kazuyuki Ueda، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
6
From page :
600
To page :
605
Abstract :
A scanning electron-stimulated desorption (ESD) ion microscope (SESDIM) measured the 2-D images of hydrogen and oxygen distribution on solid surfaces. A primary electron beam at 600 eV, with a pulse width of 220 ns, resulted in ion yields of H+ and O+. This SESDIM is applied to the surface analysis of Porous-Si (Po-Si) partially covered with SiN films. During the heating of a specimen of the Po-Si at 800 8C under ultra-high-vacuum (UHV) conditions, the components of the surface materials were moved or diffused by thermal decomposition accompanied by a redistribution of hydrogen and oxygen. After cyclic heating of above 800 8C, the dynamic behaviors of H+ and O+ accompanied by the movements of the SiN layers were observed as images of H+ and O+. This was because the H+ and O+ ions have been identified as composite materials by their kinetic energies
Keywords :
Hydrogen microscope , ESD , hydrogen , Oxygen , Porous-Si , Time-of-flight technique
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
2004
Link To Document :
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