Record number :
1000292
Title of article :
Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing
Author/Authors :
R. Hiruta، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
5
From page :
63
To page :
67
Abstract :
We have investigated the effect of high temperature hydrogen annealing on the sidewall morphology of micron-sized trenches formed on a Si(0 0 1) substrate by atomic force microscopy.We show that high temperature hydrogen annealing is effective for the flattening of as-etched rough surfaces and yields surfaces having atomic steps and terraces when the annealing temperature exceeds 1000 8C. We also found that, during hydrogen annealing, large-scale structural changes accompanied trench corner rounding and occurred through the movement of steps on the sidewall surfaces.
Keywords :
AFM , Hydrogen annealing , Surface morphology , STEP , Trench
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
2004
Link To Document :
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