The aim of the study was to investigate the influence of cerium ion implantation on the oxidation behavior of ZrN coating.
Samples was deposited by cathodic arc deposition and subsequently implanted with different doses of cerium using a MEVVA
ion implanter. The ions were extracted with a voltage of 40 kV, and the dose ranged from 5 1016 to 2 1017 ions/cm2. The air
oxidation behaviors at 500 8C of as-deposited and Ce-implanted ZrN coatings were characterized by weight gain measurement.
The oxidation resistance of ZrN coating reduced after implantation with cerium at low dose but rebounded at higher dose. The
oxidation rate of ZrN coatings were 2:18 10 7, 5:21 10 8, 4:18 10 7 and 1:56 10 7 mg2 cm 4 s 1 with dose of 0,
5 1016, 1 1017 and 2 1017 ions/cm2. X-ray photoelectron spectroscopy and glancing angle X-ray diffraction were
employed to analyze the valence states of the oxide scale and the phase composition of the oxidation layers, respectively.
Cerium implantation could improve the oxidation resistance of ZrN coating with higher dose. Finally, the mechanism of the
oxidation behavior is discussed.
Ion implantation , Zirconium nitride , Oxidation behavior , MEVVA , Cathodic arc deposition