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Title of article :
XPS and SIMS study of the ageing mechanism of Zr–V non-evaporable getter films
Author/Authors :
Vladim?´r Matol?´n*، نويسنده , , Karel Mas?ek، نويسنده , , Iva Matol?´nova´، نويسنده , , Toma´s? Ska´la، نويسنده , , Kater?ina Veltruska، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
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Abstract :
Thin films of the Zr–V getter alloy were prepared on stainless steel substrates using magnetron sputtering. The getter surface chemical composition was investigated by X-ray photoelectron spectroscopy (XPS) for four air exposure/activation cycles. The experimental results show the decrease of the activation capacity after several oxidation/activation cycles. The adsorbed carbon is transformed simultaneously to zirconium and vanadium carbides, which are inactive for both oxidation and reduction processes. Higher affinity of V to carbon atoms was confirmed by secondary ion mass spectroscopy (SIMS) study of CO adsorption.
Keywords :
zirconium , secondary ion mass spectroscopy , vanadium , Non-evaporable getters , X-ray photoelectron spectroscopy , Gettering , Alloy
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
Link To Document :