Record number :
1000153
Title of article :
Auger electronic spectroscopy and electrical characterisation of InP(100) surfaces passivated by N2 plasma
Author/Authors :
M. Petit، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Pages :
6
From page :
451
To page :
456
Abstract :
Auger electron spectroscopy (AES) was used to investigate the processes taking place during the initial stages of InP(100) surfaces nitridation. This AES study combined with electrical measurements (intensity–voltage) shows that the processes greatly differ depending on the nitridation angles. Results show that with grazing angle for nitrogen flow, the nitridation process is more efficient. Results obtained with AES spectra are coherent with electrical measurements: Hg/InN/InP(100) Schottky diodes present different electrical characteristics for the grazing and normal flow. The passivation effect of the nitride layers depends on the incident nitrogen angle flow. # 2004 Elsevier B.V. All rights reserved.
Keywords :
Nitridation , AES , Indium nitride , Electrical measurements , Indium phosphide(100)
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
Serial Year :
2004
Link To Document :
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