Jin Ma، نويسنده , , Xiaotao Hao and Xiangdong Liu، نويسنده , , Shulai Huang، نويسنده , , Jie Huang، نويسنده , , Yingge Yang، نويسنده , , Honglei Ma، نويسنده ,
Transparent conducting antimony-doped tin oxide (SnO2:Sb) films have been prepared on polyimide and Corning 7059 substrates by radio frequency magnetron-sputtering technique at low substrate temperature (30–220 °C). Polycrystalline SnO2:Sb films having the rutile structure were deposited with resistivity as low as 3.7×10−3 Ω cm on polyimide substrate and 2×10−3 Ω cm on glass substrate. The average transmittance exceeded 70.6 and 85.5% in the visible spectrum for 285 and 315 nm thick films deposited on polyimide and glass substrate, respectively. A comparison of the properties for the films deposited on glass and organic substrates was performed.